NuFlare Technology, Inc. Overview
NuFlare Technology is a Yokohama-based specialist in semiconductor manufacturing equipment and a wholly owned Toshiba subsidiary. Its core product is the electron-beam mask writer, the tool that draws circuit patterns onto the photomasks used in lithography. The company traces this technology to Toshiba research of the 1970s. It claims the top global position in single-beam mask writers and competes with the IMS Nanofabrication and JEOL alliance in multi-beam writers for EUV-era nodes. Mask inspection systems and SiC and GaN epitaxial reactors complete the portfolio. Revenue reached a record ¥138.0 billion in FY2026, up 77% year on year, with a 25.7% operating margin. Its strategic value exceeds its size: few suppliers can pattern leading-edge masks, and Toshiba's 2020 defense against Hoya's rival bid showed how strongly its owner values that position.
NuFlare is named in market studies of the photomask services industry, but it does not sell mask-making services. It supplies the writers and inspection tools that captive mask shops and merchant mask makers use.
NuFlare describes its business as the development, manufacture, sale and maintenance of semiconductor manufacturing equipment centered on three products: electron-beam mask writers, mask inspection systems and epitaxial growth systems. Its management vision, "NuFlare, Beyond The Leading Edge," commits it to contributing to the semiconductor industry, society and mankind through leading-edge equipment.
An independent reading is narrower. NuFlare is primarily a concentrated capital-goods supplier to a handful of advanced mask lines. Roughly nine-tenths of revenue came from mask writers in the last years of product disclosure, and President Masato Saito named this concentration as a key challenge in August 2026. Epitaxy and inspection are options on diversification, not yet comparable profit pools on the available evidence.
Value chain position. A mask writer sits upstream of wafer lithography. A blank from suppliers such as Hoya or AGC is coated and patterned with a mask writer, inspected, repaired and then used in steppers and scanners. Any pattern defect repeats across wafers, which makes writer accuracy and reliability central to device yield.
Business model. Sales are order-driven and lumpy, with unit prices that were estimated at US$15–20 million per e-beam tool in 2006. Revenue also includes maintenance, service and parts, which were not split out separately. The FY2019 Securities Report shows the rhythm: first-quarter sales were only ¥3.1 billion against ¥57.8 billion for the full year. Customers pay advances, which stood at ¥10.8 billion at March 2018 and ¥6.6 billion at March 2019. Installed-base support is a stated growth objective, and in February 2022 Toshiba described recurring support and maintenance as a business to expand.
Revenue mix. Product, service and parts revenue are not separately published. The company has no disclosed subscription or licensing revenue.
Customer types. Customers are captive mask shops within logic, foundry and memory makers, merchant mask makers and epitaxial wafer or power-device makers. Customers above 10% of sales included TSMC and Samsung in FY2019, and AMTC, Samsung and TSMC in FY2018. GlobalFoundries, Intel, SK hynix and TSMC appeared in FY2017. An older industry account also lists DNP, Toppan and Intel as customers.
End-markets. Demand derives from advanced logic and memory scaling, EUV and High-NA EUV adoption, mature-node mask capacity in emerging markets and SiC and GaN power devices.
Strategy
Stated themes. The latest public strategy comes from management's August 2026 interview. Its themes are timing next-generation tools to node migrations, differentiating through software, opening new inspection and epitaxy markets, reducing writer concentration and sharpening focus on customers' "true needs."
Multi-beam leadership: Details: Synchronize tool releases to 2nm, A14 and beyond to gain share; Status: MBM-4000 on sale since 2025
Software differentiation: Details: Control and correction for 500,000-plus beams delivered through software; reuse of mature single-beam hardware know-how; Status: Ongoing
Inspection repositioning: Details: Differentiate against the de facto competitor standard; focus on DUV masks and emerging markets; one tool for 120nm through advanced DUV; Status: Development with customers
Epitaxy diversification: Details: Pursue SiC and GaN together; target data-center power demand; focus on Europe and North America; Status: Under way amid EV weakness
Emerging market expansion: Details: Package writers and inspection for China and India, especially mature single-beam writers; Status: Stated opportunity, subject to export controls
Mask-writer and inspection synergy: Details: Shared stages, data formats and engineering feedback; Status: Ongoing
Service capacity: Details: Secure maintenance staff and optimize cost of a growing installed base; Status: Stated priority
Technology succession: Details: Cross-divisional sharing of technical and marketing know-how; Status: Stated priority
Human capital: Details: 35 new graduates hired in 2025, up from 10 in 2021; annual employee benefit of up to ¥300,000 for health, self-development and workplace communication; Status: Ongoing
Footprint: Details: Two-site Yokohama structure since December 2025; Status: Complete
Environment: Details: Yokohama Y-SDGs certification in March 2025; updated environmental philosophy in April 2026; Status: Ongoing
Medium-term targets. NuFlare publishes no financial targets or guidance. Its last public plan was FY2020 revenue of ¥44.0 billion and ordinary income of ¥9.1 billion. In February 2022 Toshiba said it planned to reach a 50% multi-beam market share in 2023. Achievement of that target has not been publicly confirmed.
Products & Services
Pricing is not publicly disclosed for any product.
Multi-beam mask writers
| Model | Launch | Target | Key capabilities | Target customer |
|---|---|---|---|---|
| MBM-1000 | Completed FY2019 Q3 | 5nm node | Pixel-level dose correction; legacy first-generation multi-beam platform | Leading-edge mask shops |
| MBM-2000 | Commercialized Mar 2022; customer deliveries from FY2021 | 3nm generation | 260,000 beams; 16nm beam; 2.5 A/cm²; 1.6µA total current | Advanced logic and foundry masks |
| MBM-2000PLUS | Jun 2022 | 3nm+ | 3.2 A/cm²; 1.3nm image placement (3σ); 0.65nm local CD uniformity (3σ); MBF2.0 curvilinear data format | Advanced EUV masks |
| MBM-3000 | Sep 2023 | 2nm node | 12nm beamlets; 3.6 A/cm²; doubled beam count; MBF2.1; 10.5-hour write at 200 µC/cm² | N2 EUV mask production |
| MBM-4000 | Sep 2025 | A14 node, High-NA EUV | 500,000 beams; 1.1nm placement (3σ); 0.5nm CD accuracy (3σ); edge dose enhancement | Volume A14 photomask production |
| MBM-2000C | Described in a 2025 conference paper | Mature nodes | Extends multi-beam writing to mature-node masks; commercial details not publicly disclosed | Mature-node mask lines |
Single-beam (variable shaped beam) mask writers
| Model | Launch | Target | Key capabilities | Target customer |
|---|---|---|---|---|
| EBM-9500PLUS | Jul 2019 | 7nm+/5nm | 50kV; 1,200 A/cm² source; 1.8nm image placement (3σ); 1.3nm local CD uniformity (3σ); multi-pass writing | Advanced production masks |
| EBM-9500 | Aug 2015 | 7nm | Variable shaped beam, variable stage speed | Advanced masks |
| EBM-9000 | May 2013 | 10nm | Variable shaped beam | Advanced masks |
| EBM-8000P/H and /M | Jul 2019 | 45–14nm | 400 A/cm² source; low cost of ownership | Mature and mid-node mask lines |
Mask inspection
| Model | Launch | Target | Key capabilities | Target customer |
|---|---|---|---|---|
| NPI-8000 and NPI-8000V | Apr 2018 | Advanced DUV masks; 10nm masks at launch | 199nm laser; 6-inch masks; 60-minute inspection; simultaneous transmitted and reflected imaging | Mask makers |
| Next-generation DUV inspection | In development | 120nm legacy through advanced DUV | One tool intended to span nodes across process transitions | Emerging market mask shops |
| Multi-beam e-beam inspection | In development | EUV mask pattern inspection | Multi-beam optics with die-to-die and die-to-database functions | Leading-edge mask shops |
Epitaxial growth systems
| Model | Launch | Wafers | Key capabilities | Target customer |
|---|---|---|---|---|
| EPIREVO S8 | Oct 2021 | 200mm SiC | Growth of at least 50µm/h; thickness uniformity at or below 2%; dopant uniformity at or below 5%; same footprint as S6 | SiC power device and wafer makers |
| EPIREVO S6 | Aug 2014 | 100/150mm SiC | At least 50µm/h; four wafers per hour at 10µm; defect density at or below 0.02/cm² | SiC device and wafer makers |
| EPIREVO G8 | Nov 2013 | 150/200mm GaN-on-Si | At least 9µm/h; ramp of 200°C/min or more; TMG use efficiency of 20% or more | LED and GaN power makers |
| HT2000FD | Legacy | 200mm silicon | 300–900rpm wafer rotation; production discontinued, maintenance only | Installed base |
Services
The company provides installation, maintenance and parts support through regional subsidiaries and service offices, and runs a customer service portal. Executives say service staffing and operating cost are growing priorities as the installed base expands.
Financial Narrative
Current five-year record (standalone statutory notices)
FY2024 operating and ordinary income are derived from the percentage changes in the FY2025 notice. The revenue CAGR from FY2022 to FY2026 is 39.4%. Gross profit, EBITDA, pre-tax income and per-share data are not publicly disclosed for this period, and dividends per share are not meaningful under sole ownership.
Net assets for FY2025 and FY2026 are reported. Earlier years are retained earnings plus ¥8,472 million of paid-in capital, and FY2026 retained earnings are net assets less the same amount. FY2020 and FY2021 revenue were ¥40,273 million and ¥43,449 million.
Each year's implied distribution matches the prior year's net income to within ¥1 million. This points to a practice of paying almost the whole of the previous year's profit up to the parent, although actual dividends are not published. FY2021 shows a larger implied outflow of ¥20,000 million, the first full year under direct group ownership. If the pattern continues, about ¥26.9 billion would leave the company in FY2027.
Cash, debt, capex, cash flow, working capital, ROIC, current ratio, interest coverage and the cash conversion cycle are not publicly disclosed after FY2019.
Trend commentary
The revenue record has three phases. FY2022 was a transition trough as single-beam demand faded and multi-beam volumes were still emerging. FY2023 and FY2024 brought a sharp recovery, with Toshiba citing higher NuFlare mask writer sales in its FY2022 first-quarter commentary. FY2025 fell 13.5% in revenue and 53.3% in operating profit, then FY2026 set a record.
The decline in operating margin from 31.8% to 25.7% between FY2024 and FY2026, despite 53% higher revenue, is notable. Likely contributors are staff growth, new-site cost and a rising multi-beam mix. Headcount grew 26% from March 2024 to March 2026. The company does not publish a cost bridge, so these remain analytical inferences.
Liabilities have risen from ¥31.9 billion to ¥80.7 billion in four years. Line items are not published, but in the listed years customer advances and payables were the principal swing factors. A fuller order book would produce the same pattern. The company has been financed by operating liabilities and retained profit, not visibly by external capital.
Last listed five-year record (consolidated)
No dilutive securities existed, so diluted EPS was not reported.
FY2018 and FY2019 balance-sheet ratios use the restated presentation that moved deferred tax to non-current assets. FY2018 current assets were originally reported as ¥82,117 million and are ¥80,333 million on the restated basis.
At March 2019 NuFlare had no bonds or borrowings, no goodwill and intangible assets of just ¥346 million. Of its ¥57.2 billion cash, ¥45.0 billion was deposited with Toshiba group finance, a point of parent exposure. Company-defined capex was ¥1,420 million in FY2019 and ¥2,658 million in FY2018. The 2019 gross margin decline reflected a ¥5.7 billion inventory write-down. A buyback authorized in May 2019 allowed up to 620,000 shares or ¥4.0 billion.
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View Subscription PlansFinancial Detail
Product revenue (JPY Mn)
| Product revenue (JPY Mn) | FY2017 | FY2018 | FY2019 |
|---|---|---|---|
EB mask writers | 46,437 | 38,656 | 52,536 |
Mask inspection systems | 757 | 688 | 1,855 |
Epitaxial growth systems | 509 | 2,211 | 3,432 |
Total | 47,703 | 41,555 | 57,823 |
Share of revenue (%)
| Share of revenue (%) | FY2017 | FY2018 | FY2019 |
|---|---|---|---|
EB mask writers | 97.3 | 93.0 | 90.9 |
Mask inspection systems | 1.6 | 1.7 | 3.2 |
Epitaxial growth systems | 1.1 | 5.3 | 5.9 |
YoY growth (%)
| YoY growth (%) | FY2018 | FY2019 |
|---|---|---|
EB mask writers | -16.8 | 35.9 |
Mask inspection systems | -9.1 | 169.5 |
Epitaxial growth systems | 334.5 | 55.3 |
Total | -12.9 | 39.1 |
Orders and backlog, FY2019 (JPY Mn) | Orders | YoY (%) |
EB mask writers | 48,955 | -0.4 |
Mask inspection systems | 997 | 384.9 |
Epitaxial growth systems | 3,379 | 13.8 |
Total | 53,331 | 1.9 |
Income statement (JPY Mn)
| Income statement (JPY Mn) | FY2022 | FY2023 | FY2024 | FY2025 | FY2026 |
|---|---|---|---|---|---|
Revenue | 36,542 | 60,827 | 90,101 | 77,946 | 138,002 |
Net income | 2,951 | 13,843 | 24,446 | 10,601 | 26,857 |
Margin and growth (%)
| Margin and growth (%) | FY2022 | FY2023 | FY2024 | FY2025 | FY2026 |
|---|---|---|---|---|---|
Revenue growth | -15.9 | 66.5 | 48.1 | -13.5 | 77.0 |
Net margin | 8.1 | 22.8 | 27.1 | 13.6 | 19.5 |
Profitability (JPY Mn)
| Profitability (JPY Mn) | FY2024 | FY2025 | FY2026 |
|---|---|---|---|
Operating income | 28,623 | 13,378 | 35,426 |
Ordinary income | 29,809 | 15,307 | 37,487 |
Operating margin (%) | 31.8 | 17.2 | 25.7 |
Ordinary margin (%) | 33.1 | 19.6 | 27.2 |
Balance Sheet
| Balance sheet (JPY Mn) | FY2022 | FY2023 | FY2024 | FY2025 | FY2026 |
|---|---|---|---|---|---|
Total assets | 86,994 | 127,773 | 163,019 | 152,107 | 159,766 |
Retained earnings | 46,653 | 57,546 | 68,148 | 54,304 | 70,560 |
Net assets | 55,125 | 66,018 | 76,620 | 62,776 | 79,032 |
Total liabilities | 31,869 | 61,755 | 86,399 | 89,331 | 80,734 |
Derived ratios
| Derived ratios | FY2022 | FY2023 | FY2024 | FY2025 | FY2026 |
|---|---|---|---|---|---|
ROE on average equity (%) | 5.3 | 22.9 | 34.3 | 15.2 | 37.9 |
ROA on average assets (%) | 3.7 | 12.9 | 16.8 | 6.7 | 17.2 |
Equity ratio (%) | 63.4 | 51.7 | 47.0 | 41.3 | 49.5 |
Asset turnover (times) | 0.46 | 0.57 | 0.62 | 0.49 | 0.88 |
Income Statement
| Implied distributions to parent (JPY Mn) | FY2022 | FY2023 | FY2024 | FY2025 | FY2026 |
|---|---|---|---|---|---|
Opening retained earnings + net income − closing retained earnings | 4,477 | 2,950 | 13,844 | 24,445 | 10,601 |
Income statement (JPY Mn) (FY2015–FY2019)
| Income statement (JPY Mn) | FY2015 | FY2016 | FY2017 | FY2018 | FY2019 |
|---|---|---|---|---|---|
Revenue | 43,109 | 44,270 | 47,702 | 41,555 | 57,822 |
Operating income | 12,378 | 12,830 | 13,137 | 9,303 | 11,887 |
Ordinary income | 12,273 | 12,881 | 13,460 | 9,522 | 12,195 |
Net income | 9,391 | 9,212 | 9,750 | 7,063 | 8,367 |
Per share and margins (%)
| Per share and margins (%) | FY2015 | FY2016 | FY2017 | FY2018 | FY2019 |
|---|---|---|---|---|---|
Basic EPS (JPY) | 782.60 | 767.72 | 812.58 | 588.61 | 697.34 |
Dividend per share (JPY) | 125 | 125 | 125 | 150 | 150 |
Operating margin (%) | 28.7 | 29.0 | 27.5 | 22.4 | 20.6 |
Net margin (%) | 21.8 | 20.8 | 20.4 | 17.0 | 14.5 |
ROE (%) | 23.0 | 18.8 | 17.2 | 11.1 | 12.0 |
Equity ratio (%) | 67.4 | 69.8 | 73.4 | 69.8 | 72.0 |
Balance sheet and cash flow (JPY Mn)
| Balance sheet and cash flow (JPY Mn) | FY2015 | FY2016 | FY2017 | FY2018 | FY2019 |
|---|---|---|---|---|---|
Total assets | 66,883 | 75,590 | 82,919 | 95,233 | 101,151 |
Net assets | 45,053 | 52,744 | 60,832 | 66,516 | 72,856 |
Cash and equivalents | 13,889 | 31,614 | 37,210 | 47,071 | 57,155 |
Operating cash flow | -787 | 21,686 | 9,104 | 13,123 | 13,626 |
Investing cash flow | -4,499 | -1,309 | -1,867 | -1,762 | -1,730 |
Free cash flow | -5,286 | 20,376 | 7,236 | 11,360 | 11,895 |
Financing cash flow | -2,320 | -2,606 | -1,608 | -1,499 | -1,799 |
Margin Analysis (%) and Income Statement
| Detailed metrics (JPY Mn) | FY2017 | FY2018 | FY2019 |
|---|---|---|---|
Gross margin (%) | 60.0 | 60.9 | 52.9 |
EBITDA (JPY Mn) | 15,648 | 11,664 | 14,722 |
EBITDA margin (%) | 32.8 | 28.1 | 25.5 |
Depreciation (JPY Mn) | 2,511 | 2,361 | 2,835 |
Current ratio (%) | 378 | 318 | 325 |
ROA (%) | 11.8 | 7.4 | 8.3 |
ROIC (%) | 55.6 | 47.8 | 75.7 |
Asset turnover (times) | 0.60 | 0.47 | 0.59 |
Net cash / EBITDA (times) | 2.4 | 4.0 | 3.9 |
Cash conversion cycle (days) | 241.6 | 295.4 | 131.1 |
Returns & Leverage Ratios
| Working capital items (JPY Mn) | FY2017 | FY2018 | FY2019 |
|---|---|---|---|
Trade receivables | 12,883 | 10,985 | 10,663 |
Work in process | 17,017 | 19,212 | 16,578 |
Customer advances | 5,222 | 10,828 | 6,583 |
Trade payables | 9,551 | 10,364 | 11,828 |
Inventory write-downs in cost of sales | 1,480 | 344 | 5,694 |
Revenue by region (JPY Mn)
| Revenue by region (JPY Mn) | FY2017 | FY2018 | FY2019 |
|---|---|---|---|
Japan | 10,463 | 3,156 | 4,736 |
North America | 18,496 | 4,533 | 7,068 |
Europe | 288 | 4,454 | 434 |
Asia excluding Japan | 18,456 | 29,413 | 45,584 |
Total | 47,702 | 41,555 | 57,822 |
Share of revenue (%) — Japan
| Share of revenue (%) | FY2017 | FY2018 | FY2019 |
|---|---|---|---|
Japan | 21.9 | 7.6 | 8.2 |
North America | 38.8 | 10.9 | 12.2 |
Europe | 0.6 | 10.7 | 0.8 |
Asia excluding Japan | 38.7 | 70.8 | 78.8 |
YoY growth (%) — Japan
| YoY growth (%) | FY2018 | FY2019 |
|---|---|---|
Japan | -69.8 | 50.1 |
North America | -75.5 | 55.9 |
Europe | 1,446.5 | -90.3 |
Asia excluding Japan | 59.4 | 55.0 |
Share Price and Valuation Multiples (x)
| Last listed years | FY2015 | FY2016 | FY2017 | FY2018 | FY2019 |
|---|---|---|---|---|---|
Share price high (JPY) | 7,840 | 6,350 | 8,260 | 8,190 | 9,350 |
Share price low (JPY) | 4,170 | 4,200 | 4,660 | 5,500 | 4,525 |
Year-end P/E (times) | 6.82 | 6.49 | 8.33 | 11.47 | 8.80 |
Year-end P/B (times) | 1.42 | 1.13 | 1.34 | 1.22 | 1.01 |
Dividend per share (JPY) | 125 | 125 | 125 | 150 | 150 |
Five-year total shareholder return, base 100 | 80.1 | 76.8 | 104.8 | 106.7 | 99.9 |
TOPIX with dividends, base 100 | 130.7 | 116.5 | 133.7 | 154.9 | 147.1 |
Analyst Conclusions
Guidance and consensus. NuFlare gives no public guidance, and no analyst consensus exists. Qualitatively, management expects to pursue share gains in writers through next-generation timing, while recognizing that inspection and epitaxy require new market development.
Bull case
Multi-beam is delivering at scale: Evidence: Revenue rose 77% to a record in a year when JEOL described slow market recovery
Node transitions extend the runway: Evidence: MBM-4000 targets A14 and High-NA EUV with 1.1nm and 0.5nm performance
Customer ties and strategic value create durable barriers: Evidence: First TSMC award, decades of relationships, high entry barriers and Japan's supply-chain importance
Bear case
Competition remains structurally advantaged: Evidence: IMS has deep ties to TSMC and Intel, and held 74.42% of 2022 revenue
Earnings remain volatile: Evidence: FY2025 operating income fell 53.3% before rebounding, and FY2026 margin is below FY2024 despite higher sales
Diversification has been slow: Evidence: Writers remain dominant and inspection competes with an entrenched standard, while SiC faces weak EV demand
Key catalysts and monitorables (next 12 months)
FY2027 statutory notice, expected around June 2027: Why it matters: Tests whether FY2026 was a peak or a new base
MBM-4000 customer adoption and High-NA EUV ramps: Why it matters: Determines share in the next node
Toshiba relisting preparation: Why it matters: Could increase disclosure or prompt portfolio decisions
Export-control changes for China: Why it matters: Influences mature writer opportunities
New DUV inspection platform launch: Why it matters: Tests diversification strategy
SiC and GaN data-center demand: Why it matters: Could revive epitaxy
IMS ownership or next-generation launch: Why it matters: Indicates competitive intensity
Distribution level to parent: Why it matters: Shows retained capital for R&D and capacity
Analyst verdict. NuFlare has moved from the uncomfortable position it occupied at delisting. In 2019 its next-generation program was behind schedule, the market leader in multi-beam was building momentum and analysts questioned whether either Toshiba or Hoya needed to own it. By FY2026 the company had launched four multi-beam generations and more than doubled its FY2019 revenue. It also earned first-time recognition from TSMC, and that record makes Toshiba's decision to retain it look well judged commercially, whatever the governance criticism of the price paid to minorities.
The quality of the franchise rests on three things: exceptional engineering, intimate customer co-development and limited credible competition. The FY2026 record of ¥35.4 billion in operating income and 37.9% ROE shows the earning power of those assets. Yet this is not a smooth compounder. Revenue swings by tens of percent, a few customers determine outcomes and the leading competitor has strategic links to the largest buyers. The company also remains overwhelmingly dependent on mask writers.
The most important unknown is multi-beam share, which is not publicly disclosed. Available evidence suggests NuFlare has gained, but not that it has displaced IMS. Inspection and epitaxy deserve patience, not credit in a base case, until they produce visible scale. New leader Masato Saito brings direct writer engineering credentials, which suits the priority of matching A14 and High-NA EUV timing.
Our overall judgment is positive on strategic quality and cautious on visibility. NuFlare is one of the most strategically important small equipment franchises in Japan. Toshiba's potential relisting could bring welcome disclosure, but investors assessing the group should treat FY2026 as evidence of capability, not as a normalized earnings level, until a further cycle confirms it.
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View Subscription PlansExecutive Leadership
Board of Directors
| Name | Position | Remit |
|---|---|---|
Masato Saito | President & Representative Director (since 1 April 2026) | Internal Audit Division, TFW Equipment Engineering |
Kenji Ohtoshi | Managing Director | Technology Management, Engineering Management, Mask Lithography Division, Pattern Inspection Tool Development |
Hitoshi Sunaoshi | Managing Director | Procurement, Production Supervision, Shinsugita Operations Manager |
Mari Inoue | Director | Sales, Service Technology 1 and 2 |
Takao Tamura | Director | Corporate Strategic Planning, IT Promotion, Quality Assurance |
Yasutaka Himura | Director | BCP, Legal Affairs & Export Control, General Manager of General Affairs |
Tomoo Morimoto | Director | General Manager, Finance & Accounting (the senior finance role) |
Daisuke Tsukamoto | Part-time Director | — |
Koichi Hamada | Full-time Audit & Supervisory Member | Audit |
Yoshiyuki Nagatake | Part-time Audit & Supervisory Member | Audit |
“—” = not publicly disclosed.
Major Shareholders
| Holder | Stake (%) |
|---|---|
Toshiba Corporation | 100.0 |
Competitive Landscape
Key Competitors
| Competitor | Segment | Revenue and position |
|---|---|---|
IMS Nanofabrication | Multi-beam mask writers | Austrian private company valued at about US$4.3 billion in 2023; Intel majority with Bain and TSMC minority stakes at that time |
JEOL | Multi-beam platform partner; single-beam writers | FY2026 sales ¥179.4 billion; Industrial Equipment ¥48.1 billion |
Vistec Electron Beam | E-beam lithography | Private; revenue not publicly disclosed |
Raith | E-beam lithography | Private; revenue not publicly disclosed |
Elionix | E-beam lithography | Private; research-focused systems |
Crestec | E-beam lithography | Private; niche position |
KLA | Mask inspection | FY ended June 2026 revenue US$13.58 billion; net income US$4.83 billion; historic dominant inspection supplier |
Lasertec | EUV mask inspection | FY ended June 2026 revenue ¥230.5 billion; orders ¥237.5 billion |
Applied Materials | Mask inspection | Listed in EUV mask inspection studies; segment figures not disclosed |
Advantest | Mask metrology and inspection | Listed in EUV mask inspection studies |
AIXTRON | SiC and GaN epitaxy | 2025 revenue €556.6 million |
ASM International (LPE) | SiC epitaxy | LPE held more than 15% of SiC epitaxy equipment in a 2023 Yole assessment |
Tokyo Electron | SiC epitaxy | Global major |
Veeco (Epiluvac) | SiC and GaN epitaxy | Acquired Epiluvac in 2023 |
NAURA, AMEC, Jingsheng, CETC, Naso Tech | Chinese epitaxy | Rising local supply |
Benchmark, latest fiscal year | Revenue | Growth (%) |
NuFlare (Mar 2026, standalone) | ¥138.0B | 77.0 |
JEOL (Mar 2026) | ¥179.4B | -8.8 |
Lasertec (Jun 2026) | ¥230.5B | -8.3 |
AIXTRON (Dec 2025) | €556.6M | -12.1 |
Recent Developments
Individual customer contract wins are not announced.



